JPH01128003U - - Google Patents
Info
- Publication number
- JPH01128003U JPH01128003U JP2411388U JP2411388U JPH01128003U JP H01128003 U JPH01128003 U JP H01128003U JP 2411388 U JP2411388 U JP 2411388U JP 2411388 U JP2411388 U JP 2411388U JP H01128003 U JPH01128003 U JP H01128003U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- stage
- negative pressure
- diaphragms
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Actuator (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2411388U JPH066248Y2 (ja) | 1988-02-25 | 1988-02-25 | ２段式アクチュエータ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2411388U JPH066248Y2 (ja) | 1988-02-25 | 1988-02-25 | ２段式アクチュエータ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01128003U true JPH01128003U (en]) | 1989-08-31 |
| JPH066248Y2 JPH066248Y2 (ja) | 1994-02-16 |
Family
ID=31243680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2411388U Expired - Lifetime JPH066248Y2 (ja) | 1988-02-25 | 1988-02-25 | ２段式アクチュエータ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH066248Y2 (en]) |
-
1988
- 1988-02-25 JP JP2411388U patent/JPH066248Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH066248Y2 (ja) | 1994-02-16 |